Adsorption scrubber
The adsorption scrubber exhaust gas treatment equipment can treat gas types including specialty gases used in etching processes and chemical vapor deposition processes in industries such as semiconductors, liquid crystals, and solar energy, mainly including SiH4、SiH2Cl2、PH3、B2H6、TEOS、H2、CO、NF3、SF6、C2F6、WF6、NH3、N2O class