ENGINEERING CASE
ENGINEERING CASE
Customer background

The client of this project is a manufacturer of electronic components. After expanding the factory, new production equipment was added, which requires the treatment of waste gases such as silane, phosphine, diborane, and hydrogen to meet national safety emission standards and avoid environmental issues

Customer Demand
01
24-hour uninterrupted homework operation
02
The comprehensive treatment of exhaust gas emissions needs to reach 600L/M
03
The requirements for environmental protection are relatively high, and the requirement for direct emissions of exhaust gas without causing environmental problems is met
案例——实验室废气处理
Solution

(1) Provide electric thermal decomposition+polymer WET scrubber, using ultra-high temperature jacket decomposition and ultra-high pressure water molecule adsorption treatment methods

(2) Equipped with automatic drainage and self-cleaning functions

(3) Equipped with water pump flow monitoring and water tank liquid level monitoring

(4) Maximum processing capacity ≥ 600SLM

(5) Processing efficiency ≥ 99.999%


Project results
619b13b5e260f
案例——实验室废气处理